Semiconductors
Semiconductor Applications
Semiconductor fabrication requires materials with exceptional purity, plasma resistance, and low particle generation. Our sealing components are designed for wafer processing, lithography, etch, deposition, and metrology equipment where contamination control is paramount.
Garlast works closely with tool manufacturers and fabs to deliver repeatable performance, extended maintenance intervals, and reliable sealing in aggressive fluorinated chemistries and high-temperature vacuums.
Key Requirements:
- Ultra-low metallic and ionic extractables
- Minimal outgassing and particle shedding
- Plasma, ozone, and reactive gas resistance
- Dimensional stability in vacuum and high temperature
- Compatibility with advanced cleans and CMP slurries
- Traceability and clean-room packaging
Recommended Materials
Garlast® FFKM
Temperature Range: -20°C to +327°C
Key Benefits: Ultra-high purity, plasma resistance, low outgassing
Applications: Chamber seals, slit valves, gas delivery systems
Peroxide-Cured FKM
Temperature Range: -15°C to +220°C
Key Benefits: Excellent chemical resistance with reduced metal content
Applications: Vacuum door seals, wet process equipment
High-Purity EPDM
Temperature Range: -40°C to +150°C
Key Benefits: Superior steam and DI water resistance, low leachables
Applications: CMP systems, cleaning modules, chemical delivery
PTFE & PFA Components
Temperature Range: -200°C to +260°C
Key Benefits: Extreme chemical inertness and cleanliness
Applications: Valve seats, pump diaphragms, manifolds
Specific Applications
Etch & CVD Tools
Door seals, chamber gaskets, and wafer handling components designed for plasma resistance and dimensional stability.
Front-End Lithography
Sealing solutions for photolithography systems requiring ultra-low outgassing and compatibility with photoresist chemistries.
CMP & Cleaning Systems
Slurry-resistant seals, pump diaphragms, and valve components that maintain integrity in abrasive environments.
Sub-Fab Support Equipment
Vacuum pumps, abatement systems, and chemical distribution components engineered for long service life and safety.
